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The agreement marks the start of a new five-year phase in their long-standing alliance. It will enable imec and TEL to deepen their joint R&D efforts in key areas such as next-generation patterning, advanced logic device processing, future memory development, and 3D integration all aimed at developing semiconductor nodes beyond 2nm.
Since 1995, imec and TEL have partnered to drive advances in patterning, logic, memory, and 3D integration. Their long-standing collaboration has led to key breakthroughs in areas such as High NA EUV lithography, etching, wet processing and, deposition. A standout achievement was the joint development of EUV resist coating track technology, which thanks to its significantly improved defectivity control has played a pivotal role in enabling the introduction of EUV technology into production.
Building on this foundation, the renewed partnership will focus on co-developing tools and process technologies to support the next wave of semiconductor scaling. Joint efforts will target High NA patterning technologies, aiming to boost performance through optimized material systems and improved defectivity control, as well as advanced deposition and etch solutions for next-generation CFET devices. The agreement also reflects a shared commitment to sustainability, with imec and TEL continuing to explore environmentally responsible manufacturing processes for future semiconductor nodes.
“This extended collaboration is another strong example of imec’s commitment to building international R&D partnerships that benefit the entire semiconductor ecosystem. By deepening our alignment with TEL, we can garner valuable insights that will strengthen other flagship initiatives such as the NanoIC pilot line under the European Chips Act. Hence, this partnership is truly a win-win: it reinforces TEL’s technology leadership while cementing imec’s position as a global hub for advanced semiconductor research driving innovation well into the next decade,” said Luc Van den hove, CEO of imec.
“We are pleased to extend our collaboration with imec, a world leader in semiconductor research. This agreement reinforces our commitment to staying at the forefront of innovation while accelerating the development of technologies critical for advanced nodes. By leveraging imec’s expertise in process optimization and sustainability, we are confident we can deliver solutions that meet the performance and environmental demands of our global customer base,” added Toshiki Kawai, President and CEO of Tokyo Electron.
About imec
Imec (mec-int.com) is a world-leading research and innovation center in nanoelectronics and digital technologies. Imec leverages its state-of-the-art R&D infrastructure and its team of more than 6.000 employees and top researchers, for R&D in advanced semiconductor and system scaling, silicon photonics, artificial intelligence, beyond 5G communications and sensing technologies, and in application domains such as health and life sciences, mobility, industry 4.0, agrofood, smart cities, sustainable energy, education, … Imec unites world-industry leaders across the semiconductor value chain, Flanders-based and international tech, pharma, medical and ICT companies, start-ups, and academia and knowledge centers. Imec is headquartered in Leuven (Belgium), and has research sites across Belgium, in the Netherlands, the UK and the USA, and representation in 3 continents. In 2023, imec's revenue (P&L) totaled 941 million euro.
The imec group holds a global trademark portfolio, including word marks and combined figurative registered and unregistered trademarks, across national, regional, and international territories. Its lawful use requires prior written consent of IMEC in compliance with the IMEC branding guidelines, which may be updated periodically. The latest version is available upon written request.
About Tokyo Electron (TEL)
As a leading global company of innovative semiconductor production equipment, Tokyo Electron (tel.com) engages in development, manufacturing, and sales in a wide range of product fields. All of TEL's semiconductor production equipment product lines maintain high market shares in their respective global segments. TEL provides outstanding products and services to customers through a global network in the U.S., Europe, and Asia.
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