MOST TRUSTED NEWSWIRE PRESS RELEASE DISTRIBUTION
PRTODAY / NewswireToday press release distribution service network
Written by / Agency / Source: Imec
Check Ads Availability|e-mail Article

Are you the owner of this article?, Turn it PREMIUM with your LOGO instead - and make it 3rd party Ads-Free! within the next hour!

Imec Reports Customized Lenslet Array for KLA-Tencor’s Advanced e-beam Tool - Imec announces that it has designed and fabricated an electrostatic micro-lens (lenslet) array for KLA-Tencor’s anticipated Reflective Electron Beam Lithography (REBL) tool - imec.be
Imec Reports Customized Lenslet Array for KLA-Tencor’s Advanced e-beam Tool

 

NewswireToday - /newswire/ - Leuven, Belgium, 2012/11/06 - Imec announces that it has designed and fabricated an electrostatic micro-lens (lenslet) array for KLA-Tencor’s anticipated Reflective Electron Beam Lithography (REBL) tool - imec.be.

   
 
Your Banner Ad Here instead - Showing along with ALL Articles covering Computer Hardware / Storage Announcements

Replace these Affiliate Programs at ANYTIME! Your banner here within the next hour. Learn How!


 

The REBL technology potentially enables a high throughput e-beam writing process for maskless lithography. The lenslet array is a key component for the parallelization of the e-beam writing process. Functionality of the lenslet chip was demonstrated in KLA-Tencor’s REBL e-beam column.

The lenslet consists of a densely packed array of 4µm deep cylindrical holes with a 1.4 µm diameter and top spacing of only 200nm. The electron beam entering the lenslet holes is focused through a set of 4 ring electrodes. The ring electrodes can be tuned to focus the electron beams by applying static voltages up to 50V on the ring electrodes. The bottom of each hole consists of a small metal plate that can be switched by a CMOS circuitry below, either reflecting or absorbing the incoming electrons. In this way, the incoming electron beam is split into 1 million smaller beamlets, a strategy designed to enable higher throughput for the e-beam writing process through parallelization.

Via its CMORE service, imec offers companies all the services need to develop packaged customized specialty microsystem products. Imec’s services range from feasibility studies, design and technology development, testing and reliability studies, to prototyping and low-volume manufacturing. And through its alliances, imec can also offer a path to transfer the technology to a foundry for volume production. The CMORE toolbox contains a wide variety of device technologies on 200mm such as CMOS, Si-photonics, MEMS, specialty image sensors and packaging.

“Many companies can benefit from specialty semiconductor devices to enhance and increase the functionality of their equipment;” states Rudi Cartuyvels, Vice President Smart Systems and Energy Technology at imec. “We are pleased that our semiconductor and heterogeneous integration expertise, and our design and production service, supported the development of KLA-Tencor’s REBL tool.”

About imec
Imec (imec.be) performs world-leading research in nanoelectronics. Imec leverages its scientific knowledge with the innovative power of its global partnerships in ICT, healthcare and energy. Imec delivers industry-relevant technology solutions. In a unique high-tech environment, its international top talent is committed to providing the building blocks for a better life in a sustainable society. Imec is headquartered in Leuven, Belgium, and has offices in Belgium, the Netherlands, Taiwan, US, China, India and Japan. Its staff of close to 2,000 people includes more than 600 industrial residents and guest researchers. In 2011, imec's revenue (P&L) was about 300 million euro.

Imec is a registered trademark for the activities of IMEC International (a legal entity set up under Belgian law as a "stichting van openbaar nut”), imec Belgium (IMEC vzw supported by the Flemish Government), imec the Netherlands (Stichting IMEC Nederland, part of Holst Centre which is supported by the Dutch Government), imec Taiwan (IMEC Taiwan Co.) and imec China (IMEC Microelectronics (Shangai) Co. Ltd.) and imec India (Imec India Private Limited).

Forward Looking Statements
Statements in this press release other than historical facts, such as statements regarding the potential capabilities and performance of KLA-Tencor’s REBL technology, the functionality of imec’s lenslet array and the performance enhancements that it offers, and the potential benefits that may generally be realized by users of imec’s or KLA-Tencor’s offerings, are forward-looking statements. These forward-looking statements are based on current information and expectations, and involve a number of risks and uncertainties. Actual results may differ materially from those projected in such statements due to various factors.
This research was, in part, funded by the U.S. Government. The views and conclusions contained in this document are those of the authors and should not be viewed as representing the official policies, either express or implied, of the U.S. Government.

 
 
Your Banner Ad Here instead - Showing along with ALL Articles covering Computer Hardware / Storage Announcements

Replace these Affiliate Programs at ANYTIME! Your banner here within the next hour. Learn How!


 

Written by / Agency / Source: Imec

 
 

Availability: All Regions (Including Int'l)

 

Traffic Booster: [/] Quick NewswireToday Visibility Checker

 

Distribution / Indexing: [+]  / [Company listed above is a registered member of our network. Content made possible by PRZOOM / PRTODAY indexing services]

 
 
# # #
 
 
  Your Banner Ad showing on ALL
Computer Hardware / Storage articles,
CATCH Visitors via Your Competitors Announcements!


Imec Reports Customized Lenslet Array for KLA-Tencor’s Advanced e-beam Tool

Company website links NOT available to basic submissions
It is OK to republish and/or LINK any newswire for any legitimate media purpose as long as you name NewswireToday and LINK as the source.
 
Publisher Contact: Hanne Degans - imec.be 
+32 16 28 17 69 / +32 486 065 175 (mobile) hanne.degans[.]imec.be
 
Newswire Today - PRZOOM / PRTODAY disclaims any content contained in this article. If you need/wish to contact the company who published the current release, you will need to contact them - NOT us. Issuers of articles are solely responsible for the accuracy of their content. Our complete disclaimer appears here.
IMPORTANT INFORMATION: Issuance, publication or distribution of this press release in certain jurisdictions could be subject to restrictions. The recipient of this press release is responsible for using this press release and the information herein in accordance with the applicable rules and regulations in the particular jurisdiction. This press release does not constitute an offer or an offering to acquire or subscribe for any Imec securities in any jurisdiction including any other companies listed or named in this release.

Computer Hardware / Storage via RSSAdd NewswireToday - PRZOOM Headline News to FeedBurner
Find who RetweetFollow @NewswireTODAY

Are you the owner of this article?, Turn it PREMIUM with your LOGO instead - and make it 3rd party Ads-Free! within the next hour!


Read Latest Articles From Imec / Company Profile


Read Computer Hardware / Storage Most Recent Related Newswires:

Tripp Lite’s Mobile Interactive Display Recognized for Innovation in Technology
ADVA Expands Ensemble Harmony Ecosystem to Include Disaggregated Packet Networking
ADVA Announces Winners Of 2020 Partner Awards
ADVA Launches New Generation of Edge and Access Clocks for 5G Network Timing
ADVA Expands Industry’s Most Comprehensive Multi-vendor NFV Program
ADVA and Advantech Simplify Remote UCPE Rollout with the Launch of A Virtual Lab
ADVA and 6WIND Deliver Complete UCPE Solution with High-performance Routing
Davinci-1 is the Name of the New Leonardo Supercomputer
ADVA Recognized as an Intel Network Builders Winners’ Circle Leaders Board Partner
SAPPHIRE Reveals New MB Series with Optimized Performance and Features for the Mini PC and other Market Segments
SAPPHIRE Launches NITRO+ AMD Radeon™ RX 6800 Series Graphics Cards with Enthusiast-Inspired Design and Performance
Yandex Injects 600G Wavelengths into DCI Network with ADVA TeraFlex™
ADVA Joins O-RAN ALLIANCE to Develop Open and Disaggregated Mobile Networks
Tripp Lite’s Innovative Fiber Management Solutions Win Cabling Industry Award
Eurotech Announces CPU-180-01 - A COM-HPC Module with the 11th Gen Intel® Core™ Processors

Boost Your Social Network
& Crowdfunding Campaigns


LIFETIME SOCIAL MEDIA WALL
NewswireToday Celebrates 10 Years in Business


PREMIUM Members


Visit  RightITnow, Inc.

Visit  BizJobs.com





 
  ©2021 NewswireToday — Limelon Advertising, Co.
Home | About | Advertise/Pricing | Contact | Investors | Privacy/TOS | Sitemap | FRANCAIS
newswire, PR press releases distribution service magazines engine news alert newsroom press room breaking news public relations articles company news alerts newswiredistribution ezine bizentrepreneur biznewstoday digital business report market search pr firms agencies reports distri-bution today investor relation successful internet entrepreneurs newswire distribution prtoday.com newswiredistribution asianewstoday bizwiretoday USA pr UK today - NOT affiliated with PRNewswire as we declined their partnership offer in 2013
 
PRTODAY & NewswireTODAY are proudly NOT affiliated with USA TODAY (usatoday.com)