SEMI-GAS® Systems, a division of Applied Energy Systems, Inc., and a manufacturer of industry-leading ultra-high purity gas source and distribution systems, recently introduced a new line of semi automatic valve manifold boxes that facilitate pressure regulated gas delivery to multiple points-of-use and feature a compact design and new PLC based controller. The new valve manifold boxes (VMBs) reduce cost, space requirements, high purity piping, utility demands and points of toxic gas monitoring when gas usage does not justify multiple gas cabinets.
Each new valve manifold box features a new GSM series controller. Four line semi automatic VMBs include the new GSM-VS4 controller, which replaces the now obsolete GSM 1x4 controller. The GSM-VS4 controller, benefitting from modern PLC-based technology, independently operates emergency shutoff valves, monitors input from the excess flow switches and displays delivery pressures. Local emergency shutdown via an emergency off (EMO) button and remote shutdown capabilities are standard, as well as other networking and communication signals.
Available in 4, 6 and 8 stick designs, as well as customized mini and expanded versions, the new valve manifold boxes incorporate an automatic emergency shut off (ESO) valve on each distribution stick. This ensures that each process gas is safely and continuously distributed from the gas source to various tools and points-of-use as needed in semiconductor, LED or wafer production and research and development environments.
SEMI-GAS® Systems’ upgraded semi automatic valve manifold boxes feature a rail-mounted stick design for easy maintenance and expansion to accommodate FAB additions, process changes and new tool installations. Individual process sticks are pressure regulated and the lines are isolated for localized gas control. Pressure can be monitored using gauges, indicating pressure switches or transducers.
The system is continually monitored for alarms to ensure the safest operating conditions. The GSM-VS4 controller will automatically shut the system down in the event of an alarm. The valve manifold boxes also feature an ergonomically-positioned color touch screen interface to display the system schematic and relevant operating conditions. LED lights provide constant system status.
The valve manifold box enclosure is constructed of welded 11 Ga steel, with a 1/4" thick safety glass window and a self-closing, self-latching door. The 4 stick model is 44” tall, 22” wide and 15” deep. A UL-approved fire sprinkler is also included. Each valve manifold box also features integrated wall or rack mount attachment points.
A wide array of features and options are available to create custom VMBs for specific application requirements.
Reader Service Inquiries: Megan Kasper; Applied Energy Systems; 180 Quaker Lane, Malvern, Pa. 19355; 610-647-8744.
About Applied Energy Systems, Inc.
Since 1968, Applied Energy Systems, Inc. has produced ultra-high purity gas handling and distribution equipment. In addition to its industry-leading SEMI-GAS® Systems division, Applied Energy Systems manufactures gas cabinets, valve manifold boxes and gas manifolds as well as provides high purity piping installations and precision welding services for the semiconductor, pharmaceutical, biotechnology, aerospace, university, research and development markets as well as government entities.