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Written by / Agency / Source: IntelLiDrives, Inc.

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IntelLiDrives Expands RotoRing Series with the Model RR 14-10 - Rotary table features air bearing with large center hole-through to process 300 mm semiconductor wafers - IntelLiDrives.com
IntelLiDrives Expands RotoRing Series with the Model RR 14-10

 

NewswireToday - /newswire/ - Philadelphia, PA, United States, 2011/09/03 - Rotary table features air bearing with large center hole-through to process 300 mm semiconductor wafers - IntelLiDrives.com.

   
 
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IntelLiDrives has expanded RotoRing Series with the model RR 14-10. RotoRingTM rotary tables provide superior angular positioning and are designed to eliminate backlash, friction and wear problems associated with worm, gear and belt drives.

With a ring cross-section profile (height and width) of only 45 mm, model RR 14-10 combine axial brushless RotoLinearTM motor modules and planar air bearings integrated in a compact, direct drive configuration. Large area air bearings provide sufficient payload stiffness and maximizes performance in respect to wobble and run-out.

Radially distributed RotoLinear motoring modules provide high positioning stiffness during rotary indexing and when installed on moving XY tables.

These tables provide unlimited rotation and are capable of precise positioning and velocity controls.

RotoRings tables can be mounted in any orientation and have "large open center design". When used in processing of 8" and 12" semiconductor wafers, every area of the wafer can be accessed.

In general automation applications, large open aperture offers the opportunity to access parts from inside and outside of the table simultaneously. This feature allows robotic devices, pick and place and ancillary tooling to be mounted inside the table, saving floor space and reducing parts handling with increased productivity.

Features:

• low profile
• high resolution
• large center aperture
• radial and axial air bearings
• can be mounted in any orientation
• direct drive RotoLinear™ motoring modules.

Specifications (model and system dependent)

• torque 10-50 Nm
• resolution 1-10 arc-sec
• accuracy 5-10 arc-sec
• table height 37-45 mm
• table OD 150-450 mm
• table ID 50-350 mm.

 
 
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Written by / Agency / Source: IntelLiDrives, Inc.

 
 

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IntelLiDrives Expands RotoRing Series with the Model RR 14-10

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Publisher Contact: Greg Kane - IntelLiDrives.com 
215-728-6804 admin[.]intellidrives.com
 
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