PRTODAY / NewswireToday Free press release distribution service network

Written by / Agency / Source: Imec

Check Ads Availability|e-mail Article


Are you the owner of this article?, Turn it PREMIUM with your LOGO instead - and make it 3rd party Ads-Free! within the next hour!

Imec Reveals Method of Damage-Free Cryogenic Etching of Ultralow-k Dielectrics - New method allows IC manufacturers to reach scaling levels at 20nm and beyond, without compromising speed and device cross-talk - imec.be
Imec Reveals Method of Damage-Free Cryogenic Etching of Ultralow-k Dielectrics

 

NewswireToday - /newswire/ - San Francisco, CA, United States, 2013/07/09 - New method allows IC manufacturers to reach scaling levels at 20nm and beyond, without compromising speed and device cross-talk - imec.be.

   
 
Your Banner Ad Here instead - Showing along with ALL Articles covering Electronics/Instrumentation/RFID Announcements

Replace these Affiliate Programs at ANYTIME! Your banner here within the next hour. Learn How!


 

Imec today announced a cryogenic etching method that protects the surface of porous ultralow-k dielectrics against excessive plasma induced damages.

As semiconductor technology scales below the 20nm node, the capacitance increases between nearby conductive portions of high-density integrated circuits, resulting in loss of speed and cross-talk of the device. To control the increase in capacitance in deeply-scaled devices, insulating layers of porous low-k dielectrics are integrated through plasma etching. However, plasma etching exposes the dielectrics to active plasma radicals that penetrate deeply into the porous substrate, which then react and change the composition of the dielectric.

To bypass such damages, imec developed a new cryogenic etching method. By applying very low (cryogenic) temperatures during etching, a condensation of etch products in the pores of the low-k material, results in a protection of the dielectrics’ surface. Imec demonstrated the method on a porous organosilicate (OSG) film. The results showed that no carbon depletion occurred when the wafer temperature remained below a certain critical level during plasma etching

“Our cryogenic etch method solves a key issue to further advancing scaling limits. It overcomes the disadvantages of current methods used to reduce plasma induced damage, such as dielectric etch at regular temperatures or low-k repair or high temperature pore stuffing, and it enables sub k=2.0 materials for integration,” stated Zsolt Tokei, program director interconnect at imec. “Our method is a true solution to further drive the development of next-generation, deeply-scaled technologies.”

Imec exhibits at SEMICON West, July 9-11, 2013. To learn more about imec and its new cryogenic etching method, please visit booth 1741, South hall.

About imec

Imec (imec.be) performs world-leading research in nanoelectronics. Imec leverages its scientific knowledge with the innovative power of its global partnerships in ICT, healthcare and energy. Imec delivers industry-relevant technology solutions. In a unique high-tech environment, its international top talent is committed to providing the building blocks for a better life in a sustainable society. Imec is headquartered in Leuven, Belgium, and has offices in Belgium, the Netherlands, Taiwan, US, China, India and Japan. Its staff of more than 2,000 people includes more than 650 industrial residents and guest researchers. In 2012, imec's revenue (P&L) totaled 320 million euro.

Imec is a registered trademark for the activities of IMEC International (a legal entity set up under Belgian law as a "stichting van openbaar nut”), imec Belgium (IMEC vzw supported by the Flemish Government), imec the Netherlands (Stichting IMEC Nederland, part of Holst Centre which is supported by the Dutch Government), imec Taiwan (IMEC Taiwan Co.) and imec China (IMEC Microelectronics (Shangai) Co. Ltd.) and imec India (Imec India Private Limited).

 
 
Your Banner Ad Here instead - Showing along with ALL Articles covering Electronics/Instrumentation/RFID Announcements

Replace these Affiliate Programs at ANYTIME! Your banner here within the next hour. Learn How!


 

Written by / Agency / Source: Imec

 
 

Availability: All Regions (Including Int'l)

 

Traffic Booster: [/] Quick Newswire Today Visibility Checker

 

Distribution / Indexing: [+] / [Company listed above is a registered member of our network. Content made possible by PRZOOM / PRTODAY indexing services]

 
 
# # #
 
 
  Your Banner Ad showing on ALL
Electronics/Instrumentation/RFID articles,
CATCH Visitors via Your Competitors Announcements!


Imec Reveals Method of Damage-Free Cryogenic Etching of Ultralow-k Dielectrics

Company website links NOT available to basic submissions
It is OK to republish and/or LINK any newswire for any legitimate media purpose as long as you name Newswire Today and LINK as the source.
 
  Is this your article?
Activate ALL web links and social stream by Upgrading to Press Release PREMIUM Plan Now!

Imec | Ultralow-k Dielectrics
Publisher Contact: Katrien Marent - imec.be 
+32 16 28 17 69 / +32 474 30 28 66 (mobile) katrien.marent[.]imec.be
 
Newswire Today - PRZOOM / PRTODAY disclaims any content contained in this article. If you need/wish to contact the company who published the current release, you will need to contact them - NOT us. Issuers of articles are solely responsible for the accuracy of their content. Our complete disclaimer appears here.
IMPORTANT INFORMATION: Issuance, publication or distribution of this press release in certain jurisdictions could be subject to restrictions. The recipient of this press release is responsible for using this press release and the information herein in accordance with the applicable rules and regulations in the particular jurisdiction. This press release does not constitute an offer or an offering to acquire or subscribe for any Imec securities in any jurisdiction including any other companies listed or named in this release.

Electronics/Instrumentation/RFID via RSSAdd NewswireToday - PRZOOM Headline News to FeedBurner
Find who RetweetFollow @NewswireTODAY



Are you the owner of this article?, Turn it PREMIUM with your LOGO instead - and make it 3rd party Ads-Free! within the next hour!


Read Latest Articles From Imec / Company Profile


Read Electronics/Instrumentation/RFID Most Recent Related Newswires:

Bruker Introduces the AVANCE™ NEO NMR Research Platform at ENC 2017
Bruker Introduces Novel NMR Solutions at ENC 2017
NI Demonstrates World’s First Real-Time Over-the-Air Prototype for Verizon 5G at 28 GHz
Lord Corporation Introduces G-Link-200-8G Wireless Node for Vibration and Machine Health Monitoring
GUC PCIe 3 PHY IP & PLDA EP Controller Combo Passes Compliance Test
Endress+Hauser Acquires SensAction
Data-Safe Process & Quality Control of APIs and Inorganic Impurities with Bruker's EDXRF Spectrometer S2 PUMA
Curtiss-Wright and Green Hills Software Collaborate to Bring Support for INTEGRITY-178 tuMP Safety-Certifiable RTOS to the VPX3-133 Processor
Leviton Expands Decora Smart with Z-Wave Plus Technology Product Family with Enhanced Devices
Curtiss-Wright Delivers High End Processing in Small Form Factor Rugged Mission Computer Powered by Quad-Core 6th Gen 'Skylake' Intel® Mobile Xeon®
NI Provides mmWave Real-Time Test Technology for The University of Texas at Austin Center for Transportation Research
German Companies and Research Institutes Optimize Security Solutions for Industrie 4.0 and Connected High-value Goods
Hitachi High-Technologies Launches New Transmission Electron Microscope
Curtiss-Wright Introduces High Density Solid State Drive Module
Bruker Introduces New Scientific Instruments and Analytical Solutions at Pittcon 2017

Boost Your Social Network
& Crowdfunding Campaigns


LIFETIME SOCIAL MEDIA WALL
NewswireToday Celebrates 10 Years in Business


PREMIUM Members


Visit  JobsWare.com

Visit  La Bella Bakery Artisan Bakery Arizona





 
  ©2017 Newswire Today — Limelon Advertising, Co.
Home | About | Advertise/Pricing | Contact | Investors | Privacy/TOS | Sitemap | FRANCAIS
newswire, PR free press releases distribution service magazines engine news alert newsroom press room breaking news public relations articles company news alerts newswiredistribution ezine bizentrepreneur biznewstoday digital business report market search pr firms agencies reports distri-bution today investor relation successful internet entrepreneurs newswire distribution prtoday.com freenewswiredistribution asianewstoday bizwiretoday USA pr UK today - NOT affiliated with PRNewswire as we declined their partnership offer in 2013
 
PRTODAY & NewswireTODAY are NOT affiliated with USA TODAY (usatoday.com)