The platform enables cost-effective R&D of silicon photonic ICs for high-performance optical transceivers (25Gb/s and beyond) and optical sensing and life science applications. The offered integrated components include low-loss waveguides, efficient grating couplers, high-speed silicon electro-optic modulators and high-speed germanium waveguide photo-detectors.
Since 2007, imec and its associated laboratory at Ghent University have been offering a platform for passive silicon photonic components via ePIXfab*, for R&D under shared cost conditions. Now, imec extends its silicon photonics offering, using a standard130nm CMOS toolset, with active components such as high-speed optical modulators and integrated germanium photo-detectors.
“Imec’s Silicon Photonics platform provides robust performance and solutions to integrated photonics products in medical diagnostics, telecom and datacom industries. Companies can benefit from our silicon photonics capability through established standard cells, or explore the functionality of their own designs in MPW,” stated Philippe Absil, program director at imec. “This Silicon Photonics MPW offer provides a cost-efficient solution, with state-of-the-art performance, design flexibility and superior CD and thickness control”.
The first run opens for registration with tape-in on 9th of Oct 2013 and first devices will be out in May 2014. Support, registration and design kit access will be organized by Europractice IC service, in collaboration with world-wide MPW partners.
Imec’s Si Photonics 200mm wafer platform offers extensive design flexibility and includes:
• Tight within-wafer silicon thickness variation 3 < 2.5nm
• 3-level patterning of 220nm top Si layer (193nm optical lithography)
• poly-Si overlay and patterning (193nm optical lithography)
• 3-level n-type implants and 3-level p-type implants in Si
• Ge epitaxial growth on Si and p-type and n-type implants in Ge
• Local NiSi contacts, Tungsten vias and Cu metal interconnects
• Al bond pads
• Validated cell library with fiber couplers, polarization rotators, highly efficient carrier depletion modulators and ultra-compact Ge waveguide photo-detectors with low dark current.
• Design kit support for Ipkiss, PhoeniX and Mentor Graphics software
*ePIXfab (epixfab.eu) is the European Silicon Photonics Platform co-funded by the EU. ePIXfab is a consortium of partners coordinated by imec-UGent partnership. Other members of the consortium are CEA-LETI (France), IHP (Germany) TNO (Netherlands), Tyndall (Ireland), VTT (Finland) and CMC Microsystems (Canada); providing together diverse expertise from design to packaging thus supporting the emergence of a fabless ecosystem in Silicon Photonics.
Imec (imec.be) performs world-leading research in nanoelectronics. Imec leverages its scientific knowledge with the innovative power of its global partnerships in ICT, healthcare and energy. Imec delivers industry-relevant technology solutions. In a unique high-tech environment, its international top talent is committed to providing the building blocks for a better life in a sustainable society. Imec is headquartered in Leuven, Belgium, and has offices in Belgium, the Netherlands, Taiwan, US, China, India and Japan. Its staff of close to 2,000 people includes more than 600 industrial residents and guest researchers. In 2011, imec's revenue (P&L) was about 300 million euro.
Imec is a registered trademark for the activities of IMEC International (a legal entity set up under Belgian law as a "stichting van openbaar nut”), imec Belgium (IMEC vzw supported by the Flemish Government), imec the Netherlands (Stichting IMEC Nederland, part of Holst Centre which is supported by the Dutch Government), imec Taiwan (IMEC Taiwan Co.) and imec China (IMEC Microelectronics (Shangai) Co. Ltd.) and imec India (Imec India Private Limited).
About Ghent University and Intec
Ghent University, abbreviated to UGent, is one of the major universities in the Dutch-speaking region of Europe. It distinguishes itself as a socially committed and pluralistic university in a broad international perspective.
The mission of the Department of Information Technology (Intec) of Ghent University is to provide high quality education from ungraduate to postgraduate level based on excellent research. To obtain this excellence on an international level Intec focuses its research effort on carefully chosen domains so as to achieve a critical density in each of them. In the physical layer Intec has a strong focus on nanophotonic components and more particularly silicon photonics.